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Probe Station, also known as a probe test station, is primarily used as a testin
Probe Station, also known as a probe test station, is primarily used as a testing platform for evaluating the electrical parameters of semiconductor chips. It can accommodate chips of various sizes through vacuum adsorption and is equipped with multiple adjustable probe arms and probe holders. When used in conjunction with measurement instruments, it enables testing of key parameters such as voltage, current, resistance, and capacitance-voltage (C–V) characteristic curves. Probe stations are widely used in research, experimental analysis, and sampling inspection of materials and chips.
The LVHT Series Thermal Probe Station is a high-precision thermal probe system specially developed by our company to meet the demands of university research and industrial R&D. It offers both precise displacement control and accurate temperature regulation, enabling electrical performance testing of chips under varying thermal conditions. It is widely applied in fields such as optoelectronic semiconductors and advanced materials research.
● Modular design allows flexible configuration to support a variety of test applications
● Supports sample testing up to 12 inches in diameter
● Integrated probe stage with positioning accuracy ≤ 3 μm; precision 4-axis sample stage adjustment
● Compatible with various optical microscopes; supports external optical path for optoelectronic mapping
● PID temperature control, capable of heating up to 300 °C; accuracy ±0.1 °C, uniformity ±5 °C
● Supports electrodes/PADs ≥ 1 μm
● Leakage current measurement accuracy up to 10 pA / 100 fA (in shielded enclosure)
● Probe holders adopt imported crossed roller guide rails for linear motion with zero backlash
● Extended probe arm mount supports up to 6 DC or 4 RF probe holders
● Extended probe arm mount supports up to 6 DC or 4 RF probe holders
● Microscopes support fine two-dimensional adjustment and multiple mounting/driving options
● Suitable for material electrical property testing, optoelectronic response measurements, optical/electrical mapping, and biological applications such as neuron and impedance testing systems
Optical Isolation Platform (table surface > 600mm * 600mm), One computer (with standard VGA and USB interfaces), Keithley 2400 Digital SourceMeter (including software), etc.
During testing, connect the probe station and digital source meter. The probes are connected to the object under test. Use a microscope to observe and confirm that the two probes are in contact with the surface of the object under test. Once the connection is established, open the source meter software, select the appropriate parameters, and the I-V characteristic curve for the contact point can be obtained.
