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Probe Station, also known as a probe test station, is primarily used as a testin
Probe Station, also known as a probe test station, is primarily used as a testing platform for evaluating the electrical parameters of semiconductor chips. It can accommodate chips of various sizes through vacuum adsorption and is equipped with multiple adjustable probe arms and probe holders. When used in conjunction with measurement instruments, it enables testing of key parameters such as voltage, current, resistance, and capacitance-voltage (C–V) characteristic curves. Probe stations are widely used in research, experimental analysis, and sampling inspection of materials and chips.
The LVTS Series High-Low Temperature Vacuum Probe Station is specifically designed to create a variable temperature environment—either low or high—for the device under test (DUT), enabling analysis of how chip performance parameters change with temperature. The vacuum environment within the chamber effectively prevents oxidation-sensitive semiconductor devices from being exposed to air, thereby avoiding measurement errors caused by atmospheric contact. This system is an ideal choice for research and analysis in materials science, integrated chips, and semiconductor device applications.
● Temperature control range: –142 °C to 600 °C (Note: For temperatures above 300 °C, an external water cooling system is required)
● Temperature control accuracy: ±1 °C; display resolution: 1 °C; temperature uniformity: ±3 °C
● Ultimate vacuum level: Better than 2 Pa with mechanical pump; better than 3 × 10⁻³ Pa with molecular pump system
● Probe positioning repeatability: ±2 μm; resolution: 3 μm; linear accuracy per axis: ±2 μm
● Tri-axial probe holder with ceramic structure; leakage current measurement accuracy: 100 fA
● Multiple sample stage sizes available: Standard options include 4, 6, 8, and 12 inches
Optical Isolation Platform (table surface > 600mm * 600mm), One computer (with standard VGA and USB interfaces), Keithley 2400 Digital SourceMeter (including software), etc.
During testing, connect the probe station and digital source meter. The probes are connected to the object under test. Use a microscope to observe and confirm that the two probes are in contact with the surface of the object under test. Once the connection is established, open the source meter software, select the appropriate parameters, and the I-V characteristic curve for the contact point can be obtained.
