Products

10 μm Probe Holder

As a core component of a probe station, the probe holder serves as the interface

产品介绍

As a core component of a probe station, the probe holder serves as the interface between the probe tip and the signal cables, providing electrical connectivity for semiconductor device testing. Probe holders can be categorized based on positioning accuracy, with available resolutions including 10 μm, 5 μm, 3 μm, 1 μm, and 0.5 μm.

In terms of operation mode, they are available in both manual and motorized versions. According to different application scenarios, probe holders are further classified into types such as standard, universal-angle (goniometric), and L-shaped probe holders. They are widely used for electrical parameter testing in the semiconductor and optoelectronics industries.

  • Main body made of imported aerospace-grade aluminum, ensuring high structural stability and precise linear displacement

  • Precision-machined dovetail guideways used for displacement components to guarantee positioning accuracy

  • Handwheel-driven mechanism with dual set screw design for enhanced mechanical stability

  • Multifunctional adjustment clamp supports 180° rotation and 60° directional tilt, allowing precise orientation of the probe under the microscope without obstructing the field of view

  • High-strength magnetic base with controllable magnetism; provides 5 kg of magnetic holding force for stable probe positioning

Detailed Module Configuration and Parameter Description::

通用型10μm探针座模块介绍.jpg

Technical Specifications

ParameterSpecification
Probe Travel RangeXYZ axes: 13 mm each; 180° rotation; precise 60° angular tilt
Overall Dimensions220 mm × 45 mm × 84 mm (L × W × H)
Probe Positioning Accuracy10 μm
Leakage Current Accuracy10 pA @ coaxial cable; 100 fA @ imported triaxial cable
Optional ConnectorsCoaxial (BNC, alligator clips, banana plugs) / Imported triaxial cable (triax port)
Measurement RangeCurrent: 10 pA / 100 fA ~ 10 A; Voltage: up to 1000 V

Model List:

ModelAdjustment PrecisionCable TypeLeakage Current  Accuracy
TPLS10-UP10μmCoaxial cable
(optional BNC / alligator clip / banana plug)
10pA
TPLS10H-UP10μmTriaxial cable100fA

Application Areas:

Suitable for RF MeasurementsI/O Point TestingDC TestingWafer TestingResistance & Voltage TestingSolar Cell Testing Photocurrent TestingSemiconductor Device Analysis & Testing


标签:

025-86550730