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Probe Station, also known as a probe test station, is primarily used to provide
Probe Station, also known as a probe test station, is primarily used to provide a testing platform for the electrical parameter measurement of semiconductor chips. It can accommodate chips of various sizes using vacuum adsorption, and offers multiple adjustable probe arms and probe holders. When used in conjunction with measurement instruments, it enables accurate testing of electrical characteristics such as voltage, current, resistance, and capacitance-voltage (C-V) curves of integrated circuits. It is widely applicable in research analysis and quality inspection of materials and chips.
The TLPH Series Precision Optoelectronic Probe Station is an upgraded version of the TLRH Series, equipped with a laser microscope. It achieves high-resolution imaging while supporting external laser input paths, enabling dual-function measurements of photocurrent and I–V characteristics. This makes it an ideal platform for testing optoelectronic chips and devices.
● Modular design, allowing for the combination of different components to perform various tests.；
● Maximum support for testing samples up to 12 inches in size；
● The probe station has a displacement precision of up to 3μm, with a four-dimensional precision adjustment for the sample holder；
● Compatible with various optical microscopes, and external optical paths can be used to perform photoelectric mapping tests；
● Suitable for electrodes/PADs with sizes above 1μm；
● Leakage current precision can reach 10pA/100fA (inside the shielding box)；
● The probe seat uses imported crossed roller guides, offering linear motion with no backlash design；
● The probe placement rack is wider, allowing for the accommodation of 6 DC probe seats and 4 RF probe seats；
● Equipped with a two-dimensional precision adjustment function for the microscope, with various stroke and drive options available。
Optical Isolation Platform (table surface > 600mm * 600mm), One computer (with standard VGA and USB interfaces), Keithley 2400 Digital SourceMeter (including software), etc.
During testing, connect the probe station and digital source meter. The probes are connected to the object under test. Use a microscope to observe and confirm that the two probes are in contact with the surface of the object under test. Once the connection is established, open the source meter software, select the appropriate parameters, and the I-V characteristic curve for the contact point can be obtained.
