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Probe Station, also known as a probe test station, is primarily used as a testin
Probe Station, also known as a probe test station, is primarily used as a testing platform for evaluating the electrical parameters of semiconductor chips. It can accommodate chips of various sizes through vacuum adsorption and is equipped with multiple adjustable probe arms and probe holders. When used in conjunction with measurement instruments, it enables testing of key parameters such as voltage, current, resistance, and capacitance-voltage (C–V) characteristic curves. Probe stations are widely used in research, experimental analysis, and sampling inspection of materials and chips.
The TLRB Series Standard Basic Probe Station is a cost-effective solution developed by our company to meet the needs of university research and industrial R&D. With a complete set of essential functions, it fully supports standard I–V electrical testing and is widely used in optoelectronic applications involving chips, semiconductor materials, and devices.
● Compact structure, practical functionality, and excellent cost performance
● Maximum support for testing samples up to 12 inches in size；
● Compatible with electrodes/PADs larger than 1 μm
● Accommodates high-magnification electron microscopes and stereo microscopes; allow 360° rotation and fine height adjustment
● Leakage current measurement accuracy up to 10 pA / 100 fA (within shielded enclosure)
● Equipped with precision lead screw and dovetail drive mechanism for linear movement with zero backlash
● Modular design allows expansion or reduction of functional modules based on application needs, offering high flexibility and value
Optical Isolation Platform (table surface > 600mm * 600mm), One computer (with standard VGA and USB interfaces), Keithley 2400 Digital SourceMeter (including software), etc.
During testing, connect the probe station and digital source meter. The probes are connected to the object under test. Use a microscope to observe and confirm that the two probes are in contact with the surface of the object under test. Once the connection is established, open the source meter software, select the appropriate parameters, and the I-V characteristic curve for the contact point can be obtained.
