Products

5μm Universal-Angle Probe Holder

As a core component of a probe station, the probe holder serves as the interface

产品介绍

As a core component of a probe station, the probe holder serves as the interface between the probe tip and the signal cables, providing electrical connectivity for semiconductor device testing. Probe holders can be categorized based on positioning accuracy, with available resolutions including 10 μm, 5 μm, 3 μm, 1 μm, and 0.5 μm.

In terms of operation mode, they are available in both manual and motorized versions. According to different application scenarios, probe holders are further classified into types such as standard, universal-angle (goniometric), and L-shaped probe holders. They are widely used for electrical parameter testing in the semiconductor and optoelectronics industries.

The universal-angle probe holder features multi-angle adjustability with easy locking at the desired orientation. It is designed for complex testing scenarios where probing cannot be performed in standard linear directions. This type of holder is especially suitable for irregular-shaped devices or samples requiring special positioning.

Technical Advantages::

  • Main body made of imported aerospace-grade aluminum, ensuring high structural stability and precise linear displacement

  • Precision-machined dovetail guideways used for displacement components to guarantee positioning accuracy

  • Handwheel-driven mechanism with dual set screw design for enhanced mechanical stability

  • Equipped with a directional adjustment module, supporting 360° rotation and 360° tilt adjustment with locking capability

  • Probe tip secured via threaded locking, compatible with probe needles of diameter ≤ 1 mm, ensuring high versatility

  • High-strength adjustable magnetic base with up to 5 kg magnetic holding force for secure and stable contact

Detailed Module Configuration and Parameter Description:

u7170-万向型05μm探针座细节展示.jpg

Technical Specifications

ParameterSpecification
Probe Travel RangeXYZ axes: 13 mm each; 360° rotation; Arbitrary-Angle Tilt (Lockable)
Overall Dimensions(91-230)mm × 65 mm × 160 mm (L × W × H)
Probe Positioning Accuracy5 μm
Leakage Current Accuracy10 pA @ coaxial cable; 100 fA @ imported triaxial cable
Optional ConnectorsCoaxial (BNC, alligator clips, banana plugs) / Imported triaxial cable (triax port)
Measurement RangeCurrent: 10 pA / 100 fA ~ 10 A; Voltage: up to 1000 V

Model List:

ModelAdjustment PrecisionCable TypeLeakage Current  Accuracy
TPLS05-UN10μmCoaxial cable
(optional BNC / alligator clip / banana plug)
10pA
TPLS05H-UN10μmTriaxial cable100fA

Application Areas:

Suitable for RF MeasurementsI/O Point TestingDC TestingWafer TestingResistance & Voltage TestingSolar Cell Testing Photocurrent TestingSemiconductor Device Analysis & Testing


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