Products

10 μm L-Shaped Probe Holder

As a core component of a probe station, the probe holder serves as the interface

产品介绍

As a core component of a probe station, the probe holder serves as the interface between the probe tip and the signal cables, providing electrical connectivity for semiconductor device testing. Probe holders can be categorized based on positioning accuracy, with available resolutions including 10 μm, 5 μm, 3 μm, 1 μm, and 0.5 μm.

In terms of operation mode, they are available in both manual and motorized versions. According to different application scenarios, probe holders are further classified into types such as standard, universal-angle (goniometric), and L-shaped probe holders. They are widely used for electrical parameter testing in the semiconductor and optoelectronics industries.

The L-shaped probe holder features a compact design that allows the probe to approach the sample at a shallow angle. This makes it particularly suitable for testing components or circuit boards with high-density test points, effectively avoiding probe interference. The L-type configuration offers flexible positioning and can be selected according to the specific geometry and layout of the sample.

Technical Advantages::

  • Main body made of imported aerospace-grade aluminum, ensuring high structural stability and precise linear displacement

  • Precision-machined dovetail guideways used for displacement components to guarantee positioning accuracy

  • Handwheel-driven mechanism with dual set screw design for enhanced mechanical stability

  • L-shaped probe clamp with fixed 45° insertion angle, offering ultra-high linearity for shallow-angle probing

  • Single-screw probe clamp compatible with probes ≤ 0.5 mm in diameter, ensuring wide compatibility

  • High-strength adjustable magnetic base with up to 5 kg of magnetic holding force for stable and secure contact during probing

Detailed Module Configuration and Parameter Description:

w5106-万向型05μm探针座细节展示.jpg

Technical Specifications

ParameterSpecification
Probe Travel RangeXYZ axes: 13 mm each; 180° rotation; 60° Angular Tilt
Overall Dimensions200mm*45mm*80mm(LWH)
Probe Positioning Accuracy10 μm
Leakage Current Accuracy10 pA @ coaxial cable; 100 fA @ imported triaxial cable
Optional ConnectorsCoaxial (BNC, alligator clips, banana plugs) / Imported triaxial cable (triax port)
Measurement RangeCurrent: 10 pA / 100 fA ~ 10 A; Voltage: up to 1000 V

Model List:

ModelAdjustment PrecisionCable TypeLeakage Current  Accuracy
TPLS10-L10μmCoaxial cable
(optional BNC / alligator clip / banana plug)
10pA
TPLS10H-L10μmTriaxial cable100fA

Application Areas:

Suitable for RF MeasurementsI/O Point TestingDC TestingWafer TestingResistance & Voltage TestingSolar Cell Testing Photocurrent TestingSemiconductor Device Analysis & Testing


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