Parameter | Value |
---|---|
Vacuum Chuck | 4 / 6 inches |
Sample Stage Accuracy | <3μm |
Probe Holder Accuracy | <3μm |
Leakage Current Accuracy | <100fA |
Number of Probe Holders | 3 / 3 / 4 |
Delivery Location | Southeast University |
Delivery Date | December 24, 2024 |
Delivered Product | TLRH Probe Station |
Additional Product | Shielded enclosure |
Online Store | PLCTS Store – TLRH Probe Station |
Online Store | PLCTS Store – Shielded enclosure |
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