Parameter | Value |
---|---|
Vacuum Chuck | 6 inches |
Sample Stage Displacement Accuracy | <3μm |
Probe Holder Displacement Accuracy | <3μm |
Leakage Current Accuracy | <100fA |
Number of Probe Holders | 3 |
Delivery Location | Guangdong University of Technology |
Delivery Date | February 20, 2025 |
Delivered Product | Thermal Probe Station |
Online Store | PLCTS Store – Thermal Probe Station |
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