Nanjing University of Science and Technology received a successful installation and delivery of our Thermal Vacuum Probe Station.

发布时间:2020-11-12 人气:
案例介绍

High-Low Temperature Vacuum Probe Station Successfully Installed at Nanjing University of Science and Technology

Key Specifications

SpecificationValue
Measured Vacuum Level< 1 Pa (achieved 0.17 Pa with mechanical pump)
Temperature Range–140°C to 600°C
Temperature Accuracy±1°C
Temperature Uniformity±3°C
Probe Adjustment Accuracy2 μm positioning accuracy, 3 μm resolution, ±2 μm linearity
Leakage Current Sensitivity100 fA
Sample Stage4" oxygen-free copper plate, flatness: 5 μm
Vacuum ChamberØ8" × H7", made of 304 stainless steel
Delivery LocationNanjing University of Science and Technology
Delivery DateNovember 12, 2020
Delivered ProductLVTS Thermal Vacuum Probe Station
Online StorePLCTS Store – LVTS Thermal Vacuum Probe Station

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