 发布时间:2020-11-12
 发布时间:2020-11-12
									 人气:
									人气:  
  
								| Specification | Value | 
|---|---|
| Measured Vacuum Level | < 1 Pa (achieved 0.17 Pa with mechanical pump) | 
| Temperature Range | –140°C to 600°C | 
| Temperature Accuracy | ±1°C | 
| Temperature Uniformity | ±3°C | 
| Probe Adjustment Accuracy | 2 μm positioning accuracy, 3 μm resolution, ±2 μm linearity | 
| Leakage Current Sensitivity | 100 fA | 
| Sample Stage | 4" oxygen-free copper plate, flatness: 5 μm | 
| Vacuum Chamber | Ø8" × H7", made of 304 stainless steel | 
| Delivery Location | Nanjing University of Science and Technology | 
| Delivery Date | November 12, 2020 | 
| Delivered Product | LVTS Thermal Vacuum Probe Station | 
| Online Store | PLCTS Store – LVTS Thermal Vacuum Probe Station | 
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