Parameter | Value |
---|---|
Vacuum Chuck | 8 inches |
Sample Stage Accuracy | <3 μm |
Probe Holder Accuracy | <3 μm |
Leakage Current Accuracy | <100 fA |
Number of Probe Holders | 3 units |
Delivery Location | National Research Center, Nanchang |
Delivery Date | July 11, 2023 |
Delivered Product | TLRH Probe Station |
Store Link | PLCTS Store – TLRH Probe Station |
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