Parameter | Value |
---|---|
Vacuum Chuck | 4 inches |
Sample Stage Accuracy | <3 μm |
Probe Holder Accuracy | <10 μm |
Leakage Current Accuracy | <10 pA |
Number of Probe Holders | 2 units |
Delivery Location | An Eastern China University |
Delivery Date | November 18, 2022 |
Delivered Product | TLRH Probe Station |
Store Link | PLCTS Store – TLRH Probe Station |
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