Parameter Name | Parameter Value |
---|---|
Vacuum Chuck | 6 inches |
Sample Stage Displacement Accuracy | <3μm |
Probe Seat Displacement Accuracy | <3μm |
Leakage Current Accuracy | <100fA |
Number of Probe Seats | 5 |
Delivery Location | Zhejiang Research Institute |
Delivery Date | August 6, 2024 |
Delivered Product | TLRH Probe Station |
Store Details | PLCTS Store -TLRH Probe Station |
Semiconductor Material Photoelectric Detection Power Device Testing MEMS Testing PCB Testing LCD Panel Testing
Parameter Name | Parameter Value |
---|---|
Vacuum Chuck | 6 inches |
PID Temperature Controller | Temperature control accuracy ±0.1℃, effective area uniformity ±5℃ |
Heating Temperature | Maximum heating temperature up to 300℃ |
Optional Feature 1 | 2 Set 0.7μm High Precision RF Probe Seats |
Optional Feature 2 | Imported Mitutoyo High Precision Metallurgical Microscope, 4 long working distance objectives (5X 10X 20X 50X) |
Delivery Location | Zhejiang Research Institute |
Delivery Date | August 6, 2024 |
Delivered Product | Thermal Probe Station |
Store Details | PLCTS Store - Thermal Probe Station |
Store Details | PLCTS Store - 0.7μm RF Probe Seat |
Store Details | PLCTS Store - Mitutoyo Objectives |
Semiconductor Material Photoelectric Detection Power Device Testing MEMS Testing PCB Testing LCD Panel Testing